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Laser microfabrication system MASTER FEMTO

Femtosecond laser micromachining system with high resolution positioning stages

Equipment related to Solid-state Laser suitable for Cutting Drilling Marking / Engraving Micromachining Scribing Texturing

Operated by FTMC - Center for Physical Science… and available at the facility Department of Laser technologies (… for 1 year, 3 months ago (last modified 1 year, 2 months ago); viewed 339 times, linked 0 times, and booked 0 times


Laser: Pharos (Light Conversion), pulse duration 290 fs; up to 6 W @ 1030 nm, 0.6 MHz

Wavelength: 1050 nm, 515 nm, 343 nm

Processing area: 200x200x100 mm (XYZ)

Positioning speed: Positioning stage 0.3 m/s

Degrees of freedom:

  • XY stage
  • Z axis

Precision: 0.1 μm


  • Complete computer control with the import of CAD files
  • Advanced vision control with CCD cameras

Supported files: G code, DXF, PLT, STL (3D) files

Application areas: Machinery, electronics, medical devices, optical devices, sensing applications, photovoltaics 

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